3M Novec 7300 engineered fluid is a mid-boiling hydrofluoroether (HFE) engineered fluid, chemically known as 1,1,1,2,2,3,4,5,5,5-decafluoro-3-methoxy-4-(trifluoromethyl)pentane, CAS 132182-92-4. It is widely used in semiconductor cooling, electronic testing, precision cleaning and lubricant deposition.
3M Novec 7300 engineered fluid has a boiling point of 98 °C, a density of 1.66 g/cm³ and a pour point as low as -38 °C at 25 °C, offering a wide liquid range ideal for mid-temperature cooling in semiconductor equipment.
With a dielectric constant of 6.1 and dielectric strength of about 25 kV, 3M Novec 7300 engineered fluid provides excellent electrical insulation and can directly contact energized electronic components, making it suitable for precise thermal control and cooling of ion implanters, dry etchers and CVD equipment.
On safety and the environment, 3M Novec 7300 engineered fluid has zero ozone depletion potential (ODP) and a global warming potential of about 200. It is non-flammable (no flash point), low in toxicity, thermally stable and chemically inert, with good compatibility with stainless steel, nickel, copper, aluminum, and a wide range of engineering plastics and elastomers.
3M Novec 7300 engineered fluid is suitable for semiconductor process equipment cooling and heat transfer, electronic component insulation testing, thermal shock and reliability testing, precision parts cleaning and vapor degreasing, and as a carrier for fluorinated lubricant deposition.
