3M Fluorinert FC-3283 electronic liquid is a perfluorocarbon (PFC) heat transfer fluid, chemically known as perfluorotripropylamine (C₉F₂₁N), CAS 86508-42-1, designed for single-phase heat transfer applications in semiconductor manufacturing.
3M Fluorinert FC-3283 electronic liquid has a boiling point of 128 °C and a liquid density of 1.82 g/cm³ at 25 °C, with a wide liquid range from about -50 °C to 128 °C, making it an ideal cooling medium for etchers, ion implanters, testers and other semiconductor equipment.
With a dielectric strength of 43 kV (0.1-inch gap), a dielectric constant of 1.89 and a volume resistivity of 5×10¹⁵ Ω·cm, 3M Fluorinert FC-3283 electronic liquid provides excellent electrical insulation and can directly contact energized chips and components.
As a single-component fully fluorinated compound, 3M Fluorinert FC-3283 electronic liquid is stable and will not fractionate or degrade over time, keeping thermal properties constant and minimizing fluid loss; it is highly chemically inert and compatible with most metals, plastics and elastomers.
On safety and the environment, 3M Fluorinert FC-3283 electronic liquid has zero ozone depletion potential (ODP), no flash point (non-flammable) and low toxicity. As a perfluorocarbon (PFC), it has a high global warming potential (about 5000) and a long atmospheric lifetime, and should be managed with proper recovery and recycling to minimize emissions.
3M Fluorinert FC-3283 electronic liquid is suitable for single-phase heat transfer and cooling of semiconductor equipment, data center immersion cooling, electronic component leak testing, and thermal shock testing.
