A substitute for 3M FC-3284 Electronic fluorinated liquid

TUW-3284
TUW3284 is a clear, colorless, and thermally stable perfluorinated liquid, which is
highly suitable for many single-phase heat transfer applications in the semiconductor
manufacturing industry.
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1.Product presentation:
TUW3284 is a clear, colorless, and thermally stable perfluorinated liquid, which is
highly suitable for many single-phase heat transfer applications in the semiconductor
manufacturing industry. Its liquid temperature range is from minus 73 degrees Celsius
to 50 degrees Celsius, making it an ideal choice for various applications such as
etchers, ion implanters, testers, rectifiers, and others. Since the fluorinated liquid
TUW-3284 is mainly a single compound, its composition will not change or fractionate
over time. This minimizes the liquid loss and keeps the transport properties unchanged.
2.Product features:
Colorless, tasteless, safe is not combustible;
Colorless, tasteless, safe is not combustible;
Excellent thermal conductivity, thermal stability and chemical stability;
Incompatible with water, high density, and low surface viscosity
Liquid can be distilled and recycled, and reuse can reduce costs.
High boiling point, good thermal stability, and material compatibility
No flash point