CAS 69991-67-9

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Name: Perfluoropolyether (PFPE)
CAS Number:69991-67-9
Molecular Formula: [CF(CF₃)CF₂O]ₓ (CF₂O)ᵧ (polymeric)
Molecular Weight: Variable (polymer)
Physical Form: Clear, colorless liquid
Applications:

  • Vacuum pump oil

  • Dielectric fluid / insulating fluid in electronics

  • High-performance lubricant

  • Fluid for use in PVD / CVD and ion-implantation tools