TUW-3283 Fluorinated Fluid

TUW-3283 Fluorinated Fluid is an electronic-grade perfluorinated compound (PFC) with a 128 °C boiling point, 1.83 g/mL density, a dielectric constant of just 1.96, 44 kV dielectric strength and 1.36×10¹⁴ Ω·cm volume resistivity. The low dielectric constant means very little polarisation and low dielectric loss, which makes it one of the safest insulating coolants for high-voltage and high-frequency duty.
Perfluorinated fluids contain no hydrogen, do not burn, and are so inert that they resist oxygen, strong acids and strong bases without forming acidic breakdown products. TUW-3283 Fluorinated Fluid is built on that chemistry for etcher and ion-implanter temperature control, and for insulation cooling of high-voltage transformers and RF power supplies. It is an alternative to 3M Fluorinert FC-3283 with matching physical properties and interfaces.

 

- Boiling point: 128 °C
- Pour point: −65 °C
- Density (25 °C): 1.83 g/mL
- Kinematic viscosity (25 °C): 1.32 cSt
- Surface tension: 12.7 mN/m
- Dielectric constant (1 kHz): 1.96
- Dielectric strength: 44 kV
- Volume resistivity (25 °C): 1.36×10¹⁴ Ω·cm
- Specific heat: 1.431 J/(g·°C)
- Thermal conductivity: 0.0834 W/(m·K)
- Vapour pressure (25 °C): 14.6 kPa
- ODP / GWP: 0 / 118
- Average molecular weight: 500
- CAS: 86508-42-1

 

1. Semiconductor tool cooling — Etchers, ion implanters, CVD/PVD chambers and lithography tools — temperature control and insulation.
2. High-voltage insulation — Transformers, RF power supplies and pulsed-power equipment, replacing SF6 in some applications.
3. Electronics testing — Insulation and ageing test medium for power devices and IGBT modules; thermal-shock transfer fluid.
4. Precision cleaning — Final clean of wafer carriers, optics and vacuum components where particle and ionic residue limits are tight.

 

TUW-3283 Fluorinated Fluid is extremely inert and compatible with metals, ceramics, glass and virtually all plastics, with almost no elastomer swelling. At 1.83 g/mL it is nearly twice the density of water, so open-tank designs must account for level and pump head, and spills pool at the lowest point — plan recovery and anti-slip measures.
The fluid is non-flammable with no flash point, boils at 128 °C at atmospheric pressure and has a 14.6 kPa vapour pressure at 25 °C, so losses are lower than with low-boiling grades. Its GWP of 118 is far below legacy PFCs but emissions should still be managed under local rules; prefer closed loops and distillation recovery, and never discharge to the environment.

 

25 kg pails and 250 kg drums as standard, with 5 L and 20 L packs on request. Stocked in South China and shipped with TDS, SDS, COA and batch property data.