Vacuum Lubrication Solution for Extreme Working Conditions Fomblin® PFPE Perfluoropolyether Lubricants Featuring Chemical Inertness and High-temperature Stability
2026-05-25
In high and ultra-high vacuum as well as corrosive gas environments, lubricant selection directly determines equipment operational stability, cleanliness and service life. To address this industrial challenge, Fomblin® PFPE perfluoropolyether lubricants launched by Syensqo deliver outstanding chemical inertness, superior thermal stability and extremely low vapor pressure, serving as an ideal lubrication solution for high-end vacuum equipment including semiconductors, scientific research instruments and particle accelerators.
Chemical Inertness for Severe Media Resistance
Composed solely of carbon, fluorine and oxygen atoms, Fomblin® PFPE barely reacts with any chemical substances. It can be directly exposed to highly corrosive and reactive gases such as UF₆, F₂, BF₃ and PCl₃ without degradation or polymerization. It also boasts excellent compatibility with metals, plastics and elastomers, eliminating risks of vacuum system contamination caused by lubricant decomposition.
High Thermal Stability Ensures Long-term Reliable Operation
Possessing exceptional thermal and oxidative stability, Fomblin® PFPE can operate steadily at sustained temperatures up to 280°C. As a non-flammable fluid with no flash point or ignition point, it generates no harmful deposits or coking even with repeated air exposure under high heat, greatly cutting down vacuum pump maintenance frequency. The fluid remains stable without decomposition when diffusion pump oil temperature stays below 280°C. Calcium oxide absorption tubes can be adopted to enhance safety in case of occasional partial decomposition above 290°C.
Ultra-low Vapor Pressure Enables Ultimate Vacuum
Fomblin® PFPE products feature extremely low vapor pressure. For instance, Y HVAC 140/13 registers vapor pressure at the level of 10⁻⁷ torr at 25°C. This property effectively restricts oil backflow in diffusion pumps, minimizes vacuum chamber contamination and achieves lower ultimate pressure. With remarkable radiation resistance, it fits facilities exposed to ionizing radiation such as particle accelerators and plasma devices.
Diversified Grades Cover Full-range Vacuum Pump Applications
Syensqo provides customized products for various vacuum pump types:
- Y LVAC series (06/6, 14/6, 16/6, 25/6): Sealing and lubrication for rotary pumps, turbomolecular pumps and Roots pumps.
- Y LVAC RP series (anti-rust and anti-wear modified): Prevents metal corrosion under humid conditions or heavy water vapor pumping, with anti-wear performance verified by four-ball wear tests.
- Y HVAC series (140/13): Dedicated for diffusion pumps with narrow molecular weight distribution and minimal backflow, ideal for ultra-high vacuum scenarios including SEM, TEM, mass spectrometers and ion implantation equipment.
Application Cases & Replacement Guidelines
Fomblin® PFPE is widely applied in semiconductor coating, flat panel display, vacuum metallurgy, nuclear industry and laboratory analytical instruments. When replacing mineral oil or synthetic hydrocarbon oil with Fomblin® PFPE, thoroughly clean the vacuum pump system. Conduct three cleaning cycles with Galden® SV55 solvent followed by drying to prevent residual solvent from impairing vacuum performance.
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